In this present study Copper and Copper oxide thin film deposited on a glass substrate by vacuum coater. Thermal evaporation deals with the evaporation of the source materials in a vacuum chamber and condensing the evaporated particles on a substrate. This process is conventionally called vacuum deposition. The structural, morphological studies of Copper (Cu) and copper oxide (CuO) thin films prepared by thermal evaporation method have been studied. Structural analysis results of Cu thin films demonstrate that the single phase of Cu with high a crystalline structure with a preferred orientation (111). X-ray diffraction results confirm the formation of pure (CuO) phase in thermal evaporation method. The SEM images of CuO thin films shows morphology of CuO thin films prepared at 100__ampersandsigndeg;C. The images show that the grains are not highly homogeneous in shape and size there is shape cubic, spherical and others.